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Ruthenium Metal (Ru)-Sputtering Target

Ruthenium Metal (Ru)-Sputtering Target

Molecular Formula: Ru
Purity: 99.95%-99.99 %
Products Code: 4400ST
Specification Model: 3 inch dia x 0.125 inch th.etc
EINECS No.: 231-127-1
CAS: 7440-18-8
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Ruthenium Metal (Ru)-Sputtering Target introduce:


Ruthenium is a chemical element with the symbol Ru and atomic number 44. It is a rare transition metal belonging to the platinum group of the periodic table. Like the other metals of the platinum group, ruthenium is inert to most other chemicals. 

Phase at STP: solid

Melting point: 2607 K (2334 °C, 4233 °F)

Boiling point: 4423 K (4150 °C, 7502 °F)

Density (near r.t.): 12.45 g/cm3

when liquid (at m.p.): 10.65 g/cm3

Heat of fusion: 38.59 kJ/mol

Heat of vaporization: 619 kJ/mol

Molar heat capacity: 24.06 J/(mol·K)


Most ruthenium produced is used in wear-resistant electrical contacts and thick-film resistors. A minor application for ruthenium is in platinum alloys and as a chemistry catalyst. A new application of ruthenium is as the capping layer for extreme ultraviolet photomasks.
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