Ruthenium Metal (Ru)-Sputtering Target introduce:
Ruthenium is a chemical element with the symbol Ru and atomic number 44. It is a rare transition metal belonging to the platinum group of the periodic table. Like the other metals of the platinum group, ruthenium is inert to most other chemicals.
Phase at STP： solid
Melting point： 2607 K (2334 °C, 4233 °F)
Boiling point： 4423 K (4150 °C, 7502 °F)
Density (near r.t.)： 12.45 g/cm3
when liquid (at m.p.)： 10.65 g/cm3
Heat of fusion： 38.59 kJ/mol
Heat of vaporization： 619 kJ/mol
Molar heat capacity： 24.06 J/(mol·K)
Most ruthenium produced is used in wear-resistant electrical contacts and thick-film resistors. A minor application for ruthenium is in platinum alloys and as a chemistry catalyst. A new application of ruthenium is as the capping layer for extreme ultraviolet photomasks.
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